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Gas Distribution System
  • Clean Rooms
  • Epitaxial Reactors
  • Metrology Equipment
  • Wafer Cleaning
  • Equipment Maintenance Zone
  • Gas Distribution System
  • Hydrogen Purification
  • Waste Gases Disposal and Ecological Safety
News
  • 10.10.2019 Representatives of Epiel JSC took part in The 5th Anniversary International Forum «Microelectronics 2019»

  • 26.10.2018 Epiel hosts a Customer Conference to celebrate company's 20th anniversary

  • 16.05.2018 Epiel to exhibit at SEMIEXPO Russia on May 29-30

  • 09.10.2017 Epiel to exhibit at Semicon Europa 2017, Munich on November 14-17

  • 22.05.2017 Epiel participated in The 10th International Conference on Silicon Epitaxy and heterostructures on May 14-19th

Gas Distribution System

Gases and chemicals are stored in automated gas cabinets and distributed through an ultrapure piping system.

Технополис Москва
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124460, Academic Valiyev str. 6, bld.2, Zelenograd, Moscow, Russia (on map)
Phone/Fax: +7 (499) 995 0049
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